Abstract
A novel 2-bit recessed channel nonvolatile memory device is proposed in this paper. Physically separated two charge-trapping nodes are lifted up to achieve large sensing margin in highly scaled memory devices. A successful 2-bit/cell operation with effective suppression of second bit effect is achieved by adopting the lifted charge-trapping node scheme. In addition, the effect of the source/drain junction depth on memory operation characteristics is investigated.
Original language | English |
---|---|
Article number | 4633648 |
Pages (from-to) | 111-115 |
Number of pages | 5 |
Journal | IEEE Transactions on Nanotechnology |
Volume | 8 |
Issue number | 1 |
DOIs | |
State | Published - Jan 2009 |
Keywords
- 2-bit nonvolatile memory device
- Lifted charge-trapping node scheme
- Recessed channel structure
- Second bit effect (SBE)