A direct observation on the structure evolution of memory-switching phenomena using in-situ TEM

Cha Dongkyu, Jin Ahn Su, S. Y. Park, H. Horii, D. H. Kim, Y. K. Kim, S. O. Park, In Jung U, Moon J. Kim, Kim Jiyoung

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

This paper presents a real-time observation on microstructure evolution under electrical programming pulses directly on phase-change memory cells developed with 90-nm technology for the first time. The feasibility of this in-situ TEM experiment was successfully confirmed through the observed memory-switching behavior, and it was found that slow quenching crystallization enhanced the grain growth rather than the nucleation mechanism.

Original languageEnglish
Title of host publication2009 Symposium on VLSI Technology, VLSIT 2009
Pages204-205
Number of pages2
StatePublished - 2009
Event2009 Symposium on VLSI Technology, VLSIT 2009 - Kyoto, Japan
Duration: 16 Jun 200918 Jun 2009

Publication series

NameDigest of Technical Papers - Symposium on VLSI Technology
ISSN (Print)0743-1562

Conference

Conference2009 Symposium on VLSI Technology, VLSIT 2009
Country/TerritoryJapan
CityKyoto
Period16/06/0918/06/09

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