A hybrid RF MEMS probe array system with a SP3T RF MEMS silicon switch for permittivity measurement

This paper reports a hybrid RF MEMS probe array system for permittivity measurements. A single-pole triple-throw (SP3T) RF MEMS silicon switch and a novel surface micromachined transmission line with three planar apertures were designed, fabricated and measured. These MEMS devices were connected using wire bonding and bond wire effects were cancelled as a consequence of in-liquid calibration of the whole system. A permittivity measurement of 0.9% saline was made by operating each RF MEMS silicon switch. The measured result showed good agreement with the reference value from the Cole-Cole equation up to 20 GHz. This result shows the feasibility of the proposed hybrid RF MEMS probe array system for permittivity measurements.