A MEMS-based gas sensor for automobile applications

Jin Ho Yoon, Jung Sik Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


The micro gas sensor for detecting the nitrogen oxides of automobile exhaust gas, was fabricated by using a MEMS technology and sol-gel process. The sensing electrode and micro heater were designed to be a co-planar typed structure in the Pt thin film layer. The fabricated micro platform had a low power consumption of 67 mW at 2.0 V of heater voltage and 300°C of operating temperature. Indium oxide as a sensing material for NOx gas was synthesized by a solgel process with indium isopropoxide. The particle size of synthesized In2O3 was identified as about 50 nm. The maximum gas sensitivity as relative resistance (Rs = Rgas / Rair) occurred at 300° with the value of 8.0 at 1 ppm NO 2 gas. The present study shows that a MEMS-based gas sensor is a potential candidate for the automobile AQS (air quality system) gas sensor with many advantages of small dimension, high sensitivity, short response time and low power consumption.

Original languageEnglish
Title of host publicationInternational Conference and Exhibition on Device Packaging 2009
Number of pages38
StatePublished - 2008
EventInternational Conference and Exhibition on Device Packaging 2009 - Scottsdale/Fountain Hills, AZ, United States
Duration: 9 Mar 200912 Mar 2009

Publication series

NameInternational Conference and Exhibition on Device Packaging 2009


ConferenceInternational Conference and Exhibition on Device Packaging 2009
Country/TerritoryUnited States
CityScottsdale/Fountain Hills, AZ


  • Automobile gas sensor
  • Indium oxide
  • MEMS
  • Nitrogen oxide


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