@inproceedings{5210dec1a270401daa0c649ab974d41b,
title = "A MEMS-based gas sensor for automobile applications",
abstract = "The micro gas sensor for detecting the nitrogen oxides of automobile exhaust gas, was fabricated by using a MEMS technology and sol-gel process. The sensing electrode and micro heater were designed to be a co-planar typed structure in the Pt thin film layer. The fabricated micro platform had a low power consumption of 67 mW at 2.0 V of heater voltage and 300°C of operating temperature. Indium oxide as a sensing material for NOx gas was synthesized by a solgel process with indium isopropoxide. The particle size of synthesized In2O3 was identified as about 50 nm. The maximum gas sensitivity as relative resistance (Rs = Rgas / Rair) occurred at 300° with the value of 8.0 at 1 ppm NO 2 gas. The present study shows that a MEMS-based gas sensor is a potential candidate for the automobile AQS (air quality system) gas sensor with many advantages of small dimension, high sensitivity, short response time and low power consumption.",
keywords = "Automobile gas sensor, Indium oxide, MEMS, Nitrogen oxide",
author = "Yoon, {Jin Ho} and Kim, {Jung Sik}",
year = "2008",
language = "English",
isbn = "9781615673254",
series = "International Conference and Exhibition on Device Packaging 2009",
pages = "1039--1076",
booktitle = "International Conference and Exhibition on Device Packaging 2009",
note = "International Conference and Exhibition on Device Packaging 2009 ; Conference date: 09-03-2009 Through 12-03-2009",
}