Abstract
In this study, co-planar type micro gas sensors for application of the air quality system monitoring the automobile indoor atmosphere were prepared by using a MEMS technology and sol-gel process. A finite element method (FEM) analysis was conducted in order to predict the thermal efficiency and the temperature distribution for given two types of a circular and cap heaters. SnO2/(Pd, WO3) based sensing films for measuring CO and NOx were deposited in the middle of the MEMS device by using a sol-gel process. The maximum response of the gas sensor as relative resistance (Rgas/Rair) was 0.312 at 270° for 50 ppm CO gas and 37.48 at 300° for 3 ppm NO2. This study suggests that the MEMS-based gas sensor offers a promising alternative for the next generation of automotive AQS (air quality system) gas sensors with advantages of a small dimension, high sensitivity, short response time and low power consumption.
| Original language | English |
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| Pages | 388-392 |
| Number of pages | 5 |
| State | Published - 2008 |
| Event | IMAPS International Conference and Exhibition on Device Packaging - In Conjunction with the Spring Conference on Global Business Council, GBC 2008 - Scottsdale, AZ, United States Duration: 17 Mar 2008 → 17 Mar 2008 |
Conference
| Conference | IMAPS International Conference and Exhibition on Device Packaging - In Conjunction with the Spring Conference on Global Business Council, GBC 2008 |
|---|---|
| Country/Territory | United States |
| City | Scottsdale, AZ |
| Period | 17/03/08 → 17/03/08 |
Keywords
- CO
- Gas sensor
- MEMS
- NOx
- Tin oxide