A V-band micromachined 2-D beam-steering antenna driven by magnetic force with polymer-based hinges

Chang Wook Baek; Seunghyun Song; Jae Hyoung Park; Sanghyo Lee; Jung Mu Kim; Wooyeol Choi; Changyul Cheon; Yong Kweon Kim; Youngwoo Kwon

doi:10.1109/TMTT.2002.806516

A V-band micromachined 2-D beam-steering antenna driven by magnetic force with polymer-based hinges

Chang Wook Baek, Seunghyun Song, Jae Hyoung Park, Sanghyo Lee, Jung Mu Kim, Wooyeol Choi, Changyul Cheon, Yong Kweon Kim, Youngwoo Kwon

School of Electrical and Computer Engineering

Seoul National University

Research output: Contribution to journal › Article › peer-review

55 Scopus citations

Abstract

This paper presents a new type of antenna fabricated by micromachining technology for mechanical beam steering with two degrees of freedom of motion. A V-band two-dimensional mechanical beam-steering antenna was designed and fabricated on a single high-resistivity silicon substrate using microelectromechanical systems technologies. A fabricated antenna is driven by magnetic force to overcome the limit of electrostatic actuation, and a polymer-based hinge structure is used to increase the maximum scanning angle to as much as 40°. Simulation result for validating the mechanical beam-steering concept is presented. In addition, mechanical properties such as static actuation angles are investigated together with microwave properties such as the return loss and radiation pattern at the V-band.

Original language	English
Pages (from-to)	325-331
Number of pages	7
Journal	IEEE Transactions on Microwave Theory and Techniques
Volume	51
Issue number	1 II
DOIs	https://doi.org/10.1109/TMTT.2002.806516
State	Published - Jan 2003

Keywords

Beam-steering antenna
Microelectromechanical systems (MEMS)
Micromachining

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10.1109/TMTT.2002.806516

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title = "A V-band micromachined 2-D beam-steering antenna driven by magnetic force with polymer-based hinges",

abstract = "This paper presents a new type of antenna fabricated by micromachining technology for mechanical beam steering with two degrees of freedom of motion. A V-band two-dimensional mechanical beam-steering antenna was designed and fabricated on a single high-resistivity silicon substrate using microelectromechanical systems technologies. A fabricated antenna is driven by magnetic force to overcome the limit of electrostatic actuation, and a polymer-based hinge structure is used to increase the maximum scanning angle to as much as 40°. Simulation result for validating the mechanical beam-steering concept is presented. In addition, mechanical properties such as static actuation angles are investigated together with microwave properties such as the return loss and radiation pattern at the V-band.",

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AU - Baek, Chang Wook

AU - Song, Seunghyun

AU - Park, Jae Hyoung

AU - Lee, Sanghyo

AU - Kim, Jung Mu

AU - Choi, Wooyeol

AU - Cheon, Changyul

AU - Kim, Yong Kweon

AU - Kwon, Youngwoo

PY - 2003/1

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N2 - This paper presents a new type of antenna fabricated by micromachining technology for mechanical beam steering with two degrees of freedom of motion. A V-band two-dimensional mechanical beam-steering antenna was designed and fabricated on a single high-resistivity silicon substrate using microelectromechanical systems technologies. A fabricated antenna is driven by magnetic force to overcome the limit of electrostatic actuation, and a polymer-based hinge structure is used to increase the maximum scanning angle to as much as 40°. Simulation result for validating the mechanical beam-steering concept is presented. In addition, mechanical properties such as static actuation angles are investigated together with microwave properties such as the return loss and radiation pattern at the V-band.

AB - This paper presents a new type of antenna fabricated by micromachining technology for mechanical beam steering with two degrees of freedom of motion. A V-band two-dimensional mechanical beam-steering antenna was designed and fabricated on a single high-resistivity silicon substrate using microelectromechanical systems technologies. A fabricated antenna is driven by magnetic force to overcome the limit of electrostatic actuation, and a polymer-based hinge structure is used to increase the maximum scanning angle to as much as 40°. Simulation result for validating the mechanical beam-steering concept is presented. In addition, mechanical properties such as static actuation angles are investigated together with microwave properties such as the return loss and radiation pattern at the V-band.

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KW - Microelectromechanical systems (MEMS)

KW - Micromachining

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A V-band micromachined 2-D beam-steering antenna driven by magnetic force with polymer-based hinges

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Keywords

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