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Ab initio study of incorporation of O2 molecules into Si(001) surfaces: Oxidation by Si ejection

  • B. D. Yu
  • , Young Jin Kim
  • , Junjin Jeon
  • , Hanchul Kim
  • , H. W. Yeom
  • , I. W. Lyo
  • , Ki Jeong Kong
  • , Y. Miyamoto
  • , O. Sugino
  • , T. Ohno
  • University of Seoul
  • Korea Research Institute of Standards and Science
  • Yonsei University
  • Korea Research Institute of Chemical Technology
  • NEC Corporation
  • The University of Tokyo
  • National Institute for Materials Science Tsukuba

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

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