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Ab initio study of the oxidation on vicinal Si(001) surfaces: The step-selective oxidation
Jin Nam Yeo, Gang Man Jee, B. D. Yu, Hanchul Kim, C. H. Chung, H. W. Yeom, I. W. Lyo, Ki Jeong Kong, Y. Miyamoto, O. Sugino, T. Ohno
Research output: Contribution to journal › Article › peer-review
7
Scopus
citations