Actinic EUV mask inspection using coherent EUV source based on high-order harmonic generation

Yong Soo Kim, June Park, Han Yong Park, Hamin Sung, Jomsool Kim, Seung Beom Lee, Hyun Woo Cho, Ju Han Lee, Min Chul Park, Young Min Jhon

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

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