Ammonia gas-sensing characteristics of Pd Doped-WO3

Jin Ho Yoon, Hoi Jung Lee, Jung Sik Kim

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


The micro gas sensor for ammonia gas was fabricated by using a MEMS technology and a solgel process and its sensing properties were investigated. Palladium doped tungsten trioxide as a sensing material was synthesized by a sol-gel method. Synthesized particles of Pd doped-WO3 were characterized with an average particle size of about 100 nm by FE-SEM images. The sensing material was coated on the micro platform and annealed at 400 ° C. The maximum gas sensitivity was -54% at 350 °C for 5.0 ppm-NH 3. The gas sensitivity showed a linear behavior with increasing NH3 concentration.

Original languageEnglish
Pages (from-to)46-50
Number of pages5
JournalSensor Letters
Issue number1
StatePublished - 2011


  • Ammonia
  • Gas Sensor
  • Palladium
  • Sol-Gel
  • Tungsten Trioxide


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