Ammonia gas-sensing characteristics of Pd Doped-WO3

Jin Ho Yoon; Hoi Jung Lee; Jung Sik Kim

doi:10.1166/sl.2011.1416

Ammonia gas-sensing characteristics of Pd Doped-WO₃

Jin Ho Yoon
, Hoi Jung Lee
, Jung Sik Kim

Department of Materials Science and Engineering

University of Seoul

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

The micro gas sensor for ammonia gas was fabricated by using a MEMS technology and a solgel process and its sensing properties were investigated. Palladium doped tungsten trioxide as a sensing material was synthesized by a sol-gel method. Synthesized particles of Pd doped-WO₃ were characterized with an average particle size of about 100 nm by FE-SEM images. The sensing material was coated on the micro platform and annealed at 400 ° C. The maximum gas sensitivity was -54% at 350 °C for 5.0 ppm-NH ₃. The gas sensitivity showed a linear behavior with increasing NH₃ concentration.

Original language	English
Pages (from-to)	46-50
Number of pages	5
Journal	Sensor Letters
Volume	9
Issue number	1
DOIs	https://doi.org/10.1166/sl.2011.1416
State	Published - 2011

Keywords

Ammonia
Gas Sensor
Palladium
Sol-Gel
Tungsten Trioxide

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10.1166/sl.2011.1416

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title = "Ammonia gas-sensing characteristics of Pd Doped-WO3",

abstract = "The micro gas sensor for ammonia gas was fabricated by using a MEMS technology and a solgel process and its sensing properties were investigated. Palladium doped tungsten trioxide as a sensing material was synthesized by a sol-gel method. Synthesized particles of Pd doped-WO3 were characterized with an average particle size of about 100 nm by FE-SEM images. The sensing material was coated on the micro platform and annealed at 400 ° C. The maximum gas sensitivity was -54\% at 350 °C for 5.0 ppm-NH 3. The gas sensitivity showed a linear behavior with increasing NH3 concentration.",

keywords = "Ammonia, Gas Sensor, Palladium, Sol-Gel, Tungsten Trioxide",

author = "Yoon, \{Jin Ho\} and Lee, \{Hoi Jung\} and Kim, \{Jung Sik\}",

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doi = "10.1166/sl.2011.1416",

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AU - Yoon, Jin Ho

AU - Lee, Hoi Jung

AU - Kim, Jung Sik

PY - 2011

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N2 - The micro gas sensor for ammonia gas was fabricated by using a MEMS technology and a solgel process and its sensing properties were investigated. Palladium doped tungsten trioxide as a sensing material was synthesized by a sol-gel method. Synthesized particles of Pd doped-WO3 were characterized with an average particle size of about 100 nm by FE-SEM images. The sensing material was coated on the micro platform and annealed at 400 ° C. The maximum gas sensitivity was -54% at 350 °C for 5.0 ppm-NH 3. The gas sensitivity showed a linear behavior with increasing NH3 concentration.

AB - The micro gas sensor for ammonia gas was fabricated by using a MEMS technology and a solgel process and its sensing properties were investigated. Palladium doped tungsten trioxide as a sensing material was synthesized by a sol-gel method. Synthesized particles of Pd doped-WO3 were characterized with an average particle size of about 100 nm by FE-SEM images. The sensing material was coated on the micro platform and annealed at 400 ° C. The maximum gas sensitivity was -54% at 350 °C for 5.0 ppm-NH 3. The gas sensitivity showed a linear behavior with increasing NH3 concentration.

KW - Ammonia

KW - Gas Sensor

KW - Palladium

KW - Sol-Gel

KW - Tungsten Trioxide

UR - https://www.scopus.com/pages/publications/83255163809

U2 - 10.1166/sl.2011.1416

DO - 10.1166/sl.2011.1416

M3 - Article

AN - SCOPUS:83255163809

SN - 1546-198X

VL - 9

SP - 46

EP - 50

JO - Sensor Letters

JF - Sensor Letters

IS - 1

ER -

Ammonia gas-sensing characteristics of Pd Doped-WO₃

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Keywords

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