An array of Au nanoparticles on the nanopatterned Si(1 0 0)

Sung Koo Kang, Younghun Kim, Inhee Choi, Jinwon Lee, Jongheop Yi

Research output: Contribution to journalConference articlepeer-review

8 Scopus citations


1-D arrays of Au nanoparticles (AuNPs) were fabricated on a silicon wafer. The silicon oxide patterns were prepared on the OTS-derivatized Si(1 1 0) by AFM anodic oxidation. After modifying the patterned area with APTES (aminopropyltriethoxylsilane) and MPTMS ((3-mercaptopropyl)trimethoxysilane) via a selective self-assembly technique, colloidal AuNPs were immobilized on the patterned regions of the silicon substrate. This assembled substrate was immersed in a growth solution for additional growth of the AuNPs. As a result, continuously linked 1-D arrays of nanoparticles are formed without any significant increase in line width.

Original languageEnglish
Pages (from-to)389-393
Number of pages5
JournalMicroelectronic Engineering
Issue number2-4
StatePublished - Aug 2005
EventThe Proceedings of the 2nd International Symposium on Nano- and Giga-Challenges in Microelectronics -
Duration: 12 Sep 200417 Sep 2004


  • Anodic oxidation
  • Array
  • Gold
  • Nanopatterning


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