An array of Au nanoparticles on the nanopatterned Si(1 0 0)

Sung Koo Kang; Younghun Kim; Inhee Choi; Jinwon Lee; Jongheop Yi

doi:10.1016/j.mee.2005.03.038

An array of Au nanoparticles on the nanopatterned Si(1 0 0)

Sung Koo Kang, Younghun Kim, Inhee Choi, Jinwon Lee, Jongheop Yi

Department of Life Science

Research output: Contribution to journal › Conference article › peer-review

8 Scopus citations

Abstract

1-D arrays of Au nanoparticles (AuNPs) were fabricated on a silicon wafer. The silicon oxide patterns were prepared on the OTS-derivatized Si(1 1 0) by AFM anodic oxidation. After modifying the patterned area with APTES (aminopropyltriethoxylsilane) and MPTMS ((3-mercaptopropyl)trimethoxysilane) via a selective self-assembly technique, colloidal AuNPs were immobilized on the patterned regions of the silicon substrate. This assembled substrate was immersed in a growth solution for additional growth of the AuNPs. As a result, continuously linked 1-D arrays of nanoparticles are formed without any significant increase in line width.

Original language	English
Pages (from-to)	389-393
Number of pages	5
Journal	Microelectronic Engineering
Volume	81
Issue number	2-4
DOIs	https://doi.org/10.1016/j.mee.2005.03.038
State	Published - Aug 2005
Event	The Proceedings of the 2nd International Symposium on Nano- and Giga-Challenges in Microelectronics - Duration: 12 Sep 2004 → 17 Sep 2004

Keywords

Anodic oxidation
Array
Gold
Nanopatterning

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10.1016/j.mee.2005.03.038

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title = "An array of Au nanoparticles on the nanopatterned Si(1 0 0)",

abstract = "1-D arrays of Au nanoparticles (AuNPs) were fabricated on a silicon wafer. The silicon oxide patterns were prepared on the OTS-derivatized Si(1 1 0) by AFM anodic oxidation. After modifying the patterned area with APTES (aminopropyltriethoxylsilane) and MPTMS ((3-mercaptopropyl)trimethoxysilane) via a selective self-assembly technique, colloidal AuNPs were immobilized on the patterned regions of the silicon substrate. This assembled substrate was immersed in a growth solution for additional growth of the AuNPs. As a result, continuously linked 1-D arrays of nanoparticles are formed without any significant increase in line width.",

keywords = "Anodic oxidation, Array, Gold, Nanopatterning",

author = "Kang, {Sung Koo} and Younghun Kim and Inhee Choi and Jinwon Lee and Jongheop Yi",

year = "2005",

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doi = "10.1016/j.mee.2005.03.038",

language = "English",

volume = "81",

pages = "389--393",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "2-4",

note = "The Proceedings of the 2nd International Symposium on Nano- and Giga-Challenges in Microelectronics ; Conference date: 12-09-2004 Through 17-09-2004",

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TY - JOUR

T1 - An array of Au nanoparticles on the nanopatterned Si(1 0 0)

AU - Kang, Sung Koo

AU - Kim, Younghun

AU - Choi, Inhee

AU - Lee, Jinwon

AU - Yi, Jongheop

PY - 2005/8

Y1 - 2005/8

N2 - 1-D arrays of Au nanoparticles (AuNPs) were fabricated on a silicon wafer. The silicon oxide patterns were prepared on the OTS-derivatized Si(1 1 0) by AFM anodic oxidation. After modifying the patterned area with APTES (aminopropyltriethoxylsilane) and MPTMS ((3-mercaptopropyl)trimethoxysilane) via a selective self-assembly technique, colloidal AuNPs were immobilized on the patterned regions of the silicon substrate. This assembled substrate was immersed in a growth solution for additional growth of the AuNPs. As a result, continuously linked 1-D arrays of nanoparticles are formed without any significant increase in line width.

AB - 1-D arrays of Au nanoparticles (AuNPs) were fabricated on a silicon wafer. The silicon oxide patterns were prepared on the OTS-derivatized Si(1 1 0) by AFM anodic oxidation. After modifying the patterned area with APTES (aminopropyltriethoxylsilane) and MPTMS ((3-mercaptopropyl)trimethoxysilane) via a selective self-assembly technique, colloidal AuNPs were immobilized on the patterned regions of the silicon substrate. This assembled substrate was immersed in a growth solution for additional growth of the AuNPs. As a result, continuously linked 1-D arrays of nanoparticles are formed without any significant increase in line width.

KW - Anodic oxidation

KW - Array

KW - Gold

KW - Nanopatterning

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U2 - 10.1016/j.mee.2005.03.038

DO - 10.1016/j.mee.2005.03.038

M3 - Conference article

AN - SCOPUS:23444454197

SN - 0167-9317

VL - 81

SP - 389

EP - 393

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 2-4

T2 - The Proceedings of the 2nd International Symposium on Nano- and Giga-Challenges in Microelectronics

Y2 - 12 September 2004 through 17 September 2004

ER -

An array of Au nanoparticles on the nanopatterned Si(1 0 0)

Abstract

Keywords

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