An efficient edge traces technique for 3D interconnection of stack chip

Sun Rak Kim, Ah Young Park, Choong D. Yoo, Jae Hak Lee, Jun Yeob Song, Seung S. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

An efficient edge traces technique in the wafer level is proposed and implemented in this work, which can be applied to the fabrication of the stack chip. Experiments were conducted by stacking four test chips 100μm thick, and the configuration of the pad is based on the memory chip from the electronics company. The chips for stacking were fabricated successfully through dicing the wafer and curing the adhesives in the trench. When four chips were built up and metallized, the stack chip was 430μm high, which is comparable to that of the TSV. The electrical resistance of the interconnection was measured to be 5Ω, which can be improved further with modification. The interconnection quality of the stack chip was examined through 3D images obtained with the use of the CT and X-ray. The images showed that the interconnections were made successfully.

Original languageEnglish
Title of host publication2011 IEEE 61st Electronic Components and Technology Conference, ECTC 2011
Pages1878-1882
Number of pages5
DOIs
StatePublished - 2011
Event2011 61st Electronic Components and Technology Conference, ECTC 2011 - Lake Buena Vista, FL, United States
Duration: 31 May 20113 Jun 2011

Publication series

NameProceedings - Electronic Components and Technology Conference
ISSN (Print)0569-5503

Conference

Conference2011 61st Electronic Components and Technology Conference, ECTC 2011
Country/TerritoryUnited States
CityLake Buena Vista, FL
Period31/05/113/06/11

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