Analysis of parasitic capacitance and performance in gate-ail-around and tri-gate channel vertical FET

Youngsoo Seo, Myounggon Kang, Hyungcheol Shin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The parasitic capacitances in Vertical FET(VFET) are investigated. Vertical device has additional parasitic capacitance compared with lateral device because of deeply contacted drain metal. This parasitic capacitance degrades the performance of the device. In this study, tri-gate channel VFET which eliminates the additional parasitic capacitance without broadening the device area is proposed.

Original languageEnglish
Title of host publication2017 Silicon Nanoelectronics Workshop, SNW 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages63-64
Number of pages2
ISBN (Electronic)9784863486478
DOIs
StatePublished - 29 Dec 2017
Event22nd Silicon Nanoelectronics Workshop, SNW 2017 - Kyoto, Japan
Duration: 4 Jun 20175 Jun 2017

Publication series

Name2017 Silicon Nanoelectronics Workshop, SNW 2017
Volume2017-January

Conference

Conference22nd Silicon Nanoelectronics Workshop, SNW 2017
Country/TerritoryJapan
CityKyoto
Period4/06/175/06/17

Fingerprint

Dive into the research topics of 'Analysis of parasitic capacitance and performance in gate-ail-around and tri-gate channel vertical FET'. Together they form a unique fingerprint.

Cite this