Analysis on extension region in nanowire FET considering RC delay and electrical characteristics

Jongsu Kim, Changbeom Woo, Myounggon Kang, Hyungcheol Shin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Device characteristics in the operating region, subthreshold region, and OFF region were analyzed to propose optimum design guideline for nanowire FET. First, the research was focused on the structure of extension region in perspective of RC delay. Also, Subthreshold Swing (SS) and Gate Induced Drain Leakage (GIDL) were investigated because these characteristics are greatly affected by the structure of the extension region. Therefore, by considering all characteristics in three regions of the device, it was found that the best characteristics were shown when the extension length was 6 nm without an overlap or with slight underlap.

Original languageEnglish
Title of host publication2017 Silicon Nanoelectronics Workshop, SNW 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages43-44
Number of pages2
ISBN (Electronic)9784863486478
DOIs
StatePublished - 29 Dec 2017
Event22nd Silicon Nanoelectronics Workshop, SNW 2017 - Kyoto, Japan
Duration: 4 Jun 20175 Jun 2017

Publication series

Name2017 Silicon Nanoelectronics Workshop, SNW 2017
Volume2017-January

Conference

Conference22nd Silicon Nanoelectronics Workshop, SNW 2017
Country/TerritoryJapan
CityKyoto
Period4/06/175/06/17

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