@inproceedings{951af888832f4db89c7851ce19863b2f,
title = "BSIM-CMG Modeling for 3D NAND Cell with Macaroni Channel",
abstract = "In this paper, we developed a BSIM-CMG compact model for read operation of 3D NAND string and verified the model through the result of TCAD simulation. First we extracted the parameters for a NAND unit cell with macaroni channel. For the purpose of accuracy, we extracted the parameters in 3 steps and took the effects of each step (mobility degradation factor, short channel effects and so on) into account. Then by connecting the modeled cells, we verified string characteristics such as gm variation along with the position of the selected cell and the coupling effect between neighboring word-lines and the floating node of the selected cell. This study would offer the convenience when modeling the program/erase operations.",
keywords = "3D NAND Flash, BSIM-CMG, Compact modeling, macaroni channel, TCAD",
author = "Minsoo Kim and Ilho Myeong and Juhyun Kim and Myounggon Kang and Jongwook Jeon and Hyungcheol Shin",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019 ; Conference date: 12-03-2019 Through 15-03-2019",
year = "2019",
month = mar,
doi = "10.1109/EDTM.2019.8731038",
language = "English",
series = "2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "288--290",
booktitle = "2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019",
address = "United States",
}