Characteristics of silicon nanocrystals embedded in the silicon nitride films deposited by PE-CVD at a low temperature

Research output: Contribution to conferencePaperpeer-review

Fingerprint

Dive into the research topics of 'Characteristics of silicon nanocrystals embedded in the silicon nitride films deposited by PE-CVD at a low temperature'. Together they form a unique fingerprint.
Sort by

Material Science

Engineering