@inproceedings{96ab0fc103244a0680c50a923b74cec0,
title = "Characteristics of the coherent EUV light source for EUV metrology",
abstract = "Coherent EUV light at 13.5 nm was generated by high-harmonic generation using a 35-fs pulsed laser at 796 nm in Ne gas, which showed stable operation within 5% deviation over an hour.",
keywords = "coherent EUV source, extreme ultraviolet, femtosecond laser, high-order harmonic generation",
author = "Kim, {Yong Soo} and Younghee Kim and June Park and Hamin Sung and Jomsool Kim and Lee, {Ju Han} and Jhon, {Young Min}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 ; Conference date: 24-08-2015 Through 28-08-2015",
year = "2016",
month = jan,
day = "7",
doi = "10.1109/CLEOPR.2015.7375815",
language = "English",
series = "2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015",
address = "United States",
}