Comparative study on metal-ferroelectric-insulator-semiconductor diodes composed of poly(vinyliden fluoride-trifluoroethylene) and poly(methyl metacrylate)-blended poly(vinyliden fluoride-trifluoroethylene)

Joo Won Yoon, Byung Eun Park, Hiroshi Ishiwara

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Ferroelectric poly(vinyliden fluoride-trifluoroethylene) [P(VDF-TrFE)] and poly(methyl metacrylate) (PMMA)-blended P(VDF-TrFE) thin films were deposited by spin coating on Pt/TiO2/SiO2/Si and SiO2/Si structures, and their characteristics were investigated by forming metal-ferroelectric-metal (MFM) capacitors and metal-ferroelectric-insulator- semiconductor (MFIS) diodes. It was found that the data retention characteristics of MFIS diodes were significantly improved by blending PMMA and P(VDF-TrFE) and by optimizing the insulating buffer layer thickness. Under the present conditions, the longest data retention time of 6h was obtained using a 1.5-nm-thick SiO2 buffer layer on Si.

Original languageEnglish
Pages (from-to)09KA211-09KA214
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume48
Issue number9 Part 2
DOIs
StatePublished - 2009

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