Control of silver nanoparticle size and shape in RF-biased inductively coupled plasma systems

Silver nanoparticles (Ag NPs) offer tunable physical, optical, and biological properties, making them attractive for various applications. Plasma ion-surface interactions provide a low-temperature route for synthesizing high-purity, non-agglomerated Ag NPs. In this study, we investigated the effects of the plasma ion properties (energy, density, and fluence) on Ag NP formation in RF-biased inductively coupled plasma systems. Our results demonstrate that, while ion energy significantly affects Ag NP characteristics, precise control of the Ag NP size is more effectively achieved by adjusting the number of ions bombarding the surface. Indeed, controlling the number of ions enables manipulation of the size and shape of Ag NPs, even under relatively low ion energy conditions. Furthermore, we identified a process window where Ag NP size and number density can be independently controlled by tuning the plasma ion properties.