Crystallized Nano-thick TiO2 films with low temperature ALD process

Jongsung Park, Jeungjo Han, Ohsung Song

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


To enhance the efficiency of dye sensitized solar cells, we proposed crystalline anatase-TiO2 by using a low temperature process (150°C-250°C;). We successfully fabricated 30 nm-TiO2 at a fixed atomic layer deposition condition of 1.0 sec of TDMAT pulse, 20 sec of TDMAT purge, 0.5 sec of H2O pulse, and 20 sec of H2O purge. In order to examine the microstructure, phase, and band-gap of the TiO2 respectively, we employed a Nano-Spec, transmission electron microscope, high resolution XRD, Auger electron spectroscopy, scanning probe microscope, and UV-VIS-NIR. We were able to fabricate a crystalline anatase-phase of 30 nmTiO2 successfully at temperatures above 180°C. Our results showed that our proposed low temperature ALD process (below 20°C) might be applicable to glass and flexible polymer substrates.

Original languageEnglish
Pages (from-to)449-455
Number of pages7
JournalJournal of Korean Institute of Metals and Materials
Issue number5
StatePublished - May 2010


  • ALD
  • Crystallization
  • Deposition
  • TEM
  • Thin films


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