Crystallized Nano-thick TiO2 films with low temperature ALD process

Jongsung Park, Jeungjo Han, Ohsung Song

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Fingerprint

Dive into the research topics of 'Crystallized Nano-thick TiO2 films with low temperature ALD process'. Together they form a unique fingerprint.

Material Science

Engineering