@inproceedings{844bee397dcd4e53bc586a4a710a8cf9,
title = "Design and fabrication of a MEMS-based gas sensor",
abstract = "In this study, the micro gas sensor for NOx gas was fabricated by using a MEMS technology and sol-gel process. The sensing electrode and micro heater were designed to be a coplanar typed structure in the Pt thin film layer. The fabricated micro platform had a low power consumption of 67 mW at 2.0 V of heater voltage and 300° C of operating temperature. Indium oxide as a sensing material for NOx gas was synthesized by a sol-gel process with indium isopropoxide. The particle size of synthesized In2O3 was identified as about 50 nm. The maximum gas sensitivity as relative resistance (R s = Rgas / Rair) occurred at 300° C with the value of 8.0 at 1 ppm NO2 gas. The present study shows that a MEMS-based gas sensor is a potential candidate for the automobile AQS (air quality system) gas sensor with many advantages of small dimension, high sensitivity, short response time and low power consumption.",
keywords = "Gas sensor, Indium oxide, MEMS, NO",
author = "Yoon, {Jin Ho} and Kim, {Jung Sik}",
year = "2009",
doi = "10.4028/www.scientific.net/AMR.74.255",
language = "English",
isbn = "0878493212",
series = "Advanced Materials Research",
pages = "255--258",
booktitle = "NEMS/MEMS Technology and Devices - Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, ICMAT 2009",
note = "International Conference on Materials for Advanced Technologies, ICMAT 2009 ; Conference date: 28-06-2009 Through 03-07-2009",
}