Development of Organic Thin-film Transistors on a Biocompatible Parylene-C Substrate

Kyungmin Kim, Sookyeong Kim, Ah Hyun Hong, Yoojeong Ko, Hyowon Jang, Hyeok Kim, Dong Wook Park

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


Organic thin-film transistors (OTFTs) fabricated on a biocompatible Parylene-C substrate can be applied to biosensors using a simple and cost-effective process. In this study, we developed biocompatible OTFTs by using organic materials to fabricate the substrate, gate dielectric, channel, and passivation layer. Poly(3-hexylthiophene) (P3HT) was used to fabricate the OTFTs on a Parylene-C-based platform. As the gate dielectric, Parylene-C showed promising insulation properties. Finally, we generated a cyclic olefin polymer (COP) passivation layer to protect P3HT from oxygen and moisture, and the effect of the COP passivation layer on the P3HT channel was analyzed. The proposed materials and fabrication methods will be useful for various bio-applications of OTFTs.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalJournal of Semiconductor Technology and Science
Issue number1
StatePublished - Feb 2023


  • P3HT
  • Parylene-C
  • biocompatible
  • cyclic olefin polymer
  • organic thin-film transistor


Dive into the research topics of 'Development of Organic Thin-film Transistors on a Biocompatible Parylene-C Substrate'. Together they form a unique fingerprint.

Cite this