Development of particle characteristics diagnosis system for nanoparticle analysis in vacuum

Dongbin Kim; Jihun Mun; Hyeong U. Kim; Ju Young Yun; Yong Ju Kim; Tae Wan Kim; Taesung Kim; Sang Woo Kang

doi:10.1063/1.4942247

Development of particle characteristics diagnosis system for nanoparticle analysis in vacuum

Dongbin Kim, Jihun Mun, Hyeong U. Kim, Ju Young Yun, Yong Ju Kim, Tae Wan Kim, Taesung Kim, Sang Woo Kang

School of Advanced Fusion Studies

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

A particle characteristics diagnosis system (PCDS) was developed to measure nano-sized particle properties by a combination of particle beam mass spectrometry, scanning electron microscopy (SEM), and energy dispersive x-ray spectroscopy (EDS). It allows us to measure the size distributions of nano-sized particles in real time, and the shape and composition can be determined by in situ SEM imaging and EDS scanning. PCDS was calibrated by measuring the size-classified nano-sized NaCl particles generated using an aqueous solution of NaCl by an atomizer. After the calibration, the characteristics of nano-sized particles sampled from the exhaust line of the plasma-enhanced chemical vapor deposition process were determined using PCDS.

Original language	English
Article number	023304
Journal	Review of Scientific Instruments
Volume	87
Issue number	2
DOIs	https://doi.org/10.1063/1.4942247
State	Published - 1 Feb 2016

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10.1063/1.4942247

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title = "Development of particle characteristics diagnosis system for nanoparticle analysis in vacuum",

abstract = "A particle characteristics diagnosis system (PCDS) was developed to measure nano-sized particle properties by a combination of particle beam mass spectrometry, scanning electron microscopy (SEM), and energy dispersive x-ray spectroscopy (EDS). It allows us to measure the size distributions of nano-sized particles in real time, and the shape and composition can be determined by in situ SEM imaging and EDS scanning. PCDS was calibrated by measuring the size-classified nano-sized NaCl particles generated using an aqueous solution of NaCl by an atomizer. After the calibration, the characteristics of nano-sized particles sampled from the exhaust line of the plasma-enhanced chemical vapor deposition process were determined using PCDS.",

author = "Dongbin Kim and Jihun Mun and Kim, {Hyeong U.} and Yun, {Ju Young} and Kim, {Yong Ju} and Kim, {Tae Wan} and Taesung Kim and Kang, {Sang Woo}",

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AU - Yun, Ju Young

AU - Kim, Yong Ju

AU - Kim, Tae Wan

AU - Kim, Taesung

AU - Kang, Sang Woo

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AB - A particle characteristics diagnosis system (PCDS) was developed to measure nano-sized particle properties by a combination of particle beam mass spectrometry, scanning electron microscopy (SEM), and energy dispersive x-ray spectroscopy (EDS). It allows us to measure the size distributions of nano-sized particles in real time, and the shape and composition can be determined by in situ SEM imaging and EDS scanning. PCDS was calibrated by measuring the size-classified nano-sized NaCl particles generated using an aqueous solution of NaCl by an atomizer. After the calibration, the characteristics of nano-sized particles sampled from the exhaust line of the plasma-enhanced chemical vapor deposition process were determined using PCDS.

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Development of particle characteristics diagnosis system for nanoparticle analysis in vacuum

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