Abstract
A positive feedback (PF) mechanism was adopted for the first time in the cell string of a 3-D NAND flash memory where n+ and p+ regions are formed on both ends of the string to implement a diode-type cell string. The body consists of a tube-type poly-Si channel. To generate the PF in the channel during a read operation, a new read operation scheme is proposed. In this paper, the simulator was calibrated in terms of trap density (Dit) of a poly-Si channel extracted from fabricated 3-D NAND flash memory cells. By utilizing the PF, a NAND flash memory cell in a cell string has a steep subthreshold swing of 1 mV/decade.
Original language | English |
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Article number | 7428923 |
Pages (from-to) | 1533-1538 |
Number of pages | 6 |
Journal | IEEE Transactions on Electron Devices |
Volume | 63 |
Issue number | 4 |
DOIs | |
State | Published - Apr 2016 |
Keywords
- Feedback
- NAND flash memory
- steep slope devices
- Thyristors