Directly coupled dc-squids of ybco step-edge junctions fabricated by a chemical etching process operating at 77 k

Junho Gohng; Eun Hong Lee; I. Hun Song; Junghyun Sok; Sang Jin Park; Jo Won Lee; Christelle Y. Dosquet

doi:10.1109/77.622220

Directly coupled dc-squids of ybco step-edge junctions fabricated by a chemical etching process operating at 77 k

Junho Gohng, Eun Hong Lee, I. Hun Song, Junghyun Sok, Sang Jin Park, Jo Won Lee, Christelle Y. Dosquet

Department of Physics

Samsung

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

High T_c directly coupled DC-SQUBDs have been successfully fabricated on chemically etched MgO substrate steps. The chemical etching was performed in a mixed acid solution of H₃PO₄ and H₂S04 for the best control of etched surface and roughness. YBCO thin films were deposited epitaxially on the step-edged MgO substrate by a KrF laser ablation method. Characteristics of the directly coupled DCSQUID have been studied following the patterning and fabrication of the device. The chemically etched steps show sharper edges at the bottom of the step as well as the top unlike those made by ion milling. A FM and Raman Spectroscopy studies on the YBCO thin film deposited and patterned on chemically etched show no sign of appreciable degradation. The result is a good quality junction even at a relatively low step angle. Directly coupled DC-SQUIDs that are fabricated with this process show sweeping voltages of 160 μV at 4. 2 K and 6 μV at 77 K respectively.

Original language	English
Pages (from-to)	3694-3697
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	7
Issue number	2 PART 3
DOIs	https://doi.org/10.1109/77.622220
State	Published - 1997

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title = "Directly coupled dc-squids of ybco step-edge junctions fabricated by a chemical etching process operating at 77 k",

abstract = "High Tc directly coupled DC-SQUBDs have been successfully fabricated on chemically etched MgO substrate steps. The chemical etching was performed in a mixed acid solution of H3PO4 and H2S04 for the best control of etched surface and roughness. YBCO thin films were deposited epitaxially on the step-edged MgO substrate by a KrF laser ablation method. Characteristics of the directly coupled DCSQUID have been studied following the patterning and fabrication of the device. The chemically etched steps show sharper edges at the bottom of the step as well as the top unlike those made by ion milling. A FM and Raman Spectroscopy studies on the YBCO thin film deposited and patterned on chemically etched show no sign of appreciable degradation. The result is a good quality junction even at a relatively low step angle. Directly coupled DC-SQUIDs that are fabricated with this process show sweeping voltages of 160 μV at 4. 2 K and 6 μV at 77 K respectively.",

author = "Junho Gohng and Lee, {Eun Hong} and Song, {I. Hun} and Junghyun Sok and Park, {Sang Jin} and Lee, {Jo Won} and Dosquet, {Christelle Y.}",

year = "1997",

doi = "10.1109/77.622220",

language = "English",

volume = "7",

pages = "3694--3697",

journal = "IEEE Transactions on Applied Superconductivity",

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number = "2 PART 3",

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T1 - Directly coupled dc-squids of ybco step-edge junctions fabricated by a chemical etching process operating at 77 k

AU - Gohng, Junho

AU - Lee, Eun Hong

AU - Song, I. Hun

AU - Sok, Junghyun

AU - Park, Sang Jin

AU - Lee, Jo Won

AU - Dosquet, Christelle Y.

PY - 1997

Y1 - 1997

N2 - High Tc directly coupled DC-SQUBDs have been successfully fabricated on chemically etched MgO substrate steps. The chemical etching was performed in a mixed acid solution of H3PO4 and H2S04 for the best control of etched surface and roughness. YBCO thin films were deposited epitaxially on the step-edged MgO substrate by a KrF laser ablation method. Characteristics of the directly coupled DCSQUID have been studied following the patterning and fabrication of the device. The chemically etched steps show sharper edges at the bottom of the step as well as the top unlike those made by ion milling. A FM and Raman Spectroscopy studies on the YBCO thin film deposited and patterned on chemically etched show no sign of appreciable degradation. The result is a good quality junction even at a relatively low step angle. Directly coupled DC-SQUIDs that are fabricated with this process show sweeping voltages of 160 μV at 4. 2 K and 6 μV at 77 K respectively.

AB - High Tc directly coupled DC-SQUBDs have been successfully fabricated on chemically etched MgO substrate steps. The chemical etching was performed in a mixed acid solution of H3PO4 and H2S04 for the best control of etched surface and roughness. YBCO thin films were deposited epitaxially on the step-edged MgO substrate by a KrF laser ablation method. Characteristics of the directly coupled DCSQUID have been studied following the patterning and fabrication of the device. The chemically etched steps show sharper edges at the bottom of the step as well as the top unlike those made by ion milling. A FM and Raman Spectroscopy studies on the YBCO thin film deposited and patterned on chemically etched show no sign of appreciable degradation. The result is a good quality junction even at a relatively low step angle. Directly coupled DC-SQUIDs that are fabricated with this process show sweeping voltages of 160 μV at 4. 2 K and 6 μV at 77 K respectively.

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JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

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ER -

Directly coupled dc-squids of ybco step-edge junctions fabricated by a chemical etching process operating at 77 k

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