Effect of additives on the anisotropic etching of silicon by using a TMAH based solution

Ki Hwa Jun, Bum Joon Kim, Jung Sik Kim

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Fingerprint

Dive into the research topics of 'Effect of additives on the anisotropic etching of silicon by using a TMAH based solution'. Together they form a unique fingerprint.

Material Science

Chemical Engineering