Effect of cyclic outer and inner bending on the fatigue behavior of a multi-layer metal film on a polymer substrate

The electrical reliability of a multi-layer metal film on a polymer substrate during cyclic inner bending and outer bending is investigated using a bending fatigue system. The electrical resistance of a Cu film on a polymer substrate during cyclic outer bending increases due to fatigue damage formation, such as cracks and extrusion. Cyclic inner bending also leads to fatigue damage and a similar increase in the electrical resistance. In a sample having a NiCr under-layer, however, the electrical resistance increases significantly during outer bending but not during inner bending mode. Cross-sectional observations reveal that brittle cracking in the hard under-layer results in different fatigue behaviors according to the stress mode. By applying an Al over-layer, the fatigue resistance is improved during both outer bending and inner bending by suppressing fatigue damage formation. The effects of the position, materials, and thickness of the inter-layer on the electrical reliability of a multi-layer sample are also investigated. This study can provide meaningful information for designing a multi-layer structure under various mechanical deformations including tensile and compressive stress.