TY - JOUR
T1 - Effect of laser beam focusing point on AFM measurements
AU - Kim, Younghun
AU - Yang, Young In
AU - Choi, Inhee
AU - Yi, Jongheop
PY - 2009/3
Y1 - 2009/3
N2 - The optical beam deflection method, which is used in AFM to obtain surface images, may distort the resulting image. The flexible and long cantilever is easily overdamped by the laser radiation pressure, resulting in steady deflection of the cantilever (<1 nm). This deflective force distorts the image and influences the force-distance (F-D) curve. The present study investigated the effect of laser radiation pressure on image distortion. As a proof-of-concept test, two grating samples (with step heights of 150 and 18 nm for TGX01 and TGZ01, respectively) were examined with an NSC36 series cantilever in air and water media.
AB - The optical beam deflection method, which is used in AFM to obtain surface images, may distort the resulting image. The flexible and long cantilever is easily overdamped by the laser radiation pressure, resulting in steady deflection of the cantilever (<1 nm). This deflective force distorts the image and influences the force-distance (F-D) curve. The present study investigated the effect of laser radiation pressure on image distortion. As a proof-of-concept test, two grating samples (with step heights of 150 and 18 nm for TGX01 and TGZ01, respectively) were examined with an NSC36 series cantilever in air and water media.
KW - Atomic force microscopy
KW - Image distortion
KW - Laser beam
KW - Radiation pressure
UR - http://www.scopus.com/inward/record.url?scp=62349097092&partnerID=8YFLogxK
U2 - 10.1007/s11814-009-0084-z
DO - 10.1007/s11814-009-0084-z
M3 - Article
AN - SCOPUS:62349097092
SN - 0256-1115
VL - 26
SP - 496
EP - 499
JO - Korean Journal of Chemical Engineering
JF - Korean Journal of Chemical Engineering
IS - 2
ER -