Effect of laser beam focusing point on AFM measurements

Younghun Kim, Young In Yang, Inhee Choi, Jongheop Yi

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


The optical beam deflection method, which is used in AFM to obtain surface images, may distort the resulting image. The flexible and long cantilever is easily overdamped by the laser radiation pressure, resulting in steady deflection of the cantilever (<1 nm). This deflective force distorts the image and influences the force-distance (F-D) curve. The present study investigated the effect of laser radiation pressure on image distortion. As a proof-of-concept test, two grating samples (with step heights of 150 and 18 nm for TGX01 and TGZ01, respectively) were examined with an NSC36 series cantilever in air and water media.

Original languageEnglish
Pages (from-to)496-499
Number of pages4
JournalKorean Journal of Chemical Engineering
Issue number2
StatePublished - Mar 2009


  • Atomic force microscopy
  • Image distortion
  • Laser beam
  • Radiation pressure


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