Effects of crystallinity and impurities on the electrical conductivity of Li-La-Zr-O thin films

Joong Sun Park; Lei Cheng; Vassilia Zorba; Apurva Mehta; Jordi Cabana; Guoying Chen; Marca M. Doeff; Thomas J. Richardson; Jung Hoon Park; Ji Won Son; Wan Shick Hong

doi:10.1016/j.tsf.2014.11.019

Effects of crystallinity and impurities on the electrical conductivity of Li-La-Zr-O thin films

Joong Sun Park, Lei Cheng, Vassilia Zorba, Apurva Mehta, Jordi Cabana, Guoying Chen, Marca M. Doeff, Thomas J. Richardson, Jung Hoon Park, Ji Won Son, Wan Shick Hong

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

61 Scopus citations

Abstract

We present a study of the fabrication of thin films from a Li₇La₃Zr₂O₁₂ (LLZO) target using pulsed laser deposition. The effects of substrate temperatures and impurities on electrochemical properties of the films were investigated. The thin films of Li-La-Zr-O were deposited at room temperature and higher temperatures on a variety of substrates. Deposition above 600°C resulted in a mixture of cubic and tetragonal phases of LLZO, as well as a La₂Zr₂O₇ impurity, and resulted in aluminum enrichment at the surface when Al-containing substrates were used. Films deposited at 600°C exhibited the highest room temperature conductivity, 1.61 × 10^{- 6} S/cm. The chemical stability toward metallic lithium was also studied using X-ray photoelectron spectroscopy, which showed that the oxidation state of zirconium remained at + 4 following physical contact with heated lithium metal.

Original language	English
Pages (from-to)	55-60
Number of pages	6
Journal	Thin Solid Films
Volume	576
DOIs	https://doi.org/10.1016/j.tsf.2014.11.019
State	Published - 2 Feb 2015

Keywords

Garnet
Lithium
Lithium lanthanate zirconate
Pulsed laser deposition
Solid electrolyte

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10.1016/j.tsf.2014.11.019

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title = "Effects of crystallinity and impurities on the electrical conductivity of Li-La-Zr-O thin films",

abstract = "We present a study of the fabrication of thin films from a Li7La3Zr2O12 (LLZO) target using pulsed laser deposition. The effects of substrate temperatures and impurities on electrochemical properties of the films were investigated. The thin films of Li-La-Zr-O were deposited at room temperature and higher temperatures on a variety of substrates. Deposition above 600°C resulted in a mixture of cubic and tetragonal phases of LLZO, as well as a La2Zr2O7 impurity, and resulted in aluminum enrichment at the surface when Al-containing substrates were used. Films deposited at 600°C exhibited the highest room temperature conductivity, 1.61 × 10- 6 S/cm. The chemical stability toward metallic lithium was also studied using X-ray photoelectron spectroscopy, which showed that the oxidation state of zirconium remained at + 4 following physical contact with heated lithium metal.",

keywords = "Garnet, Lithium, Lithium lanthanate zirconate, Pulsed laser deposition, Solid electrolyte",

author = "Park, {Joong Sun} and Lei Cheng and Vassilia Zorba and Apurva Mehta and Jordi Cabana and Guoying Chen and Doeff, {Marca M.} and Richardson, {Thomas J.} and Park, {Jung Hoon} and Son, {Ji Won} and Hong, {Wan Shick}",

year = "2015",

month = feb,

day = "2",

doi = "10.1016/j.tsf.2014.11.019",

language = "English",

volume = "576",

pages = "55--60",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

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T1 - Effects of crystallinity and impurities on the electrical conductivity of Li-La-Zr-O thin films

AU - Park, Joong Sun

AU - Cheng, Lei

AU - Zorba, Vassilia

AU - Mehta, Apurva

AU - Cabana, Jordi

AU - Chen, Guoying

AU - Doeff, Marca M.

AU - Richardson, Thomas J.

AU - Park, Jung Hoon

AU - Son, Ji Won

AU - Hong, Wan Shick

PY - 2015/2/2

Y1 - 2015/2/2

N2 - We present a study of the fabrication of thin films from a Li7La3Zr2O12 (LLZO) target using pulsed laser deposition. The effects of substrate temperatures and impurities on electrochemical properties of the films were investigated. The thin films of Li-La-Zr-O were deposited at room temperature and higher temperatures on a variety of substrates. Deposition above 600°C resulted in a mixture of cubic and tetragonal phases of LLZO, as well as a La2Zr2O7 impurity, and resulted in aluminum enrichment at the surface when Al-containing substrates were used. Films deposited at 600°C exhibited the highest room temperature conductivity, 1.61 × 10- 6 S/cm. The chemical stability toward metallic lithium was also studied using X-ray photoelectron spectroscopy, which showed that the oxidation state of zirconium remained at + 4 following physical contact with heated lithium metal.

AB - We present a study of the fabrication of thin films from a Li7La3Zr2O12 (LLZO) target using pulsed laser deposition. The effects of substrate temperatures and impurities on electrochemical properties of the films were investigated. The thin films of Li-La-Zr-O were deposited at room temperature and higher temperatures on a variety of substrates. Deposition above 600°C resulted in a mixture of cubic and tetragonal phases of LLZO, as well as a La2Zr2O7 impurity, and resulted in aluminum enrichment at the surface when Al-containing substrates were used. Films deposited at 600°C exhibited the highest room temperature conductivity, 1.61 × 10- 6 S/cm. The chemical stability toward metallic lithium was also studied using X-ray photoelectron spectroscopy, which showed that the oxidation state of zirconium remained at + 4 following physical contact with heated lithium metal.

KW - Garnet

KW - Lithium

KW - Lithium lanthanate zirconate

KW - Pulsed laser deposition

KW - Solid electrolyte

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U2 - 10.1016/j.tsf.2014.11.019

DO - 10.1016/j.tsf.2014.11.019

M3 - Article

AN - SCOPUS:84922362897

SN - 0040-6090

VL - 576

SP - 55

EP - 60

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Effects of crystallinity and impurities on the electrical conductivity of Li-La-Zr-O thin films

Abstract

Keywords

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