Effects of Electrostatic Interaction on the Formation of a Particle Depletion Zone by Charged Nanoparticles during the Chemical Vapor Deposition of Si Processes

Min Gyo Byun, Jeong Woo Yang, Jong Hwan Park, Nong Moon Hwang, Jinwoo Park, Byung Deok Yu

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

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