Empirical mode decomposition for dynamic AFM microcantilevers in air and liquid environment

Il Kwang Kim, Jea Woong Jang, Soo Il Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The modal decomposition of tapping mode atomic force microscopy microcantilevers in air and liquid environment was experimentally investigated to identify their complex responses. In experiment, the flexible microcantilevers and a flat HOPG sample were used. The responses of the microcantilevers were obtained to extract the linearized modes and orthogonal values using the methods for the proper orthogonal decomposition and the smooth orthogonal decomposition. The influence of the tapping setpoints and the hydrodynamic damping forces were investigated with the multi-mode response of microcantilevers. The results show that the first mode is dominant under normal operating conditions in tapping mode. However, at lower setpoint, the flexible microcantilever behaved uncertain modal distortion near the tip on the sample. The dynamics tapping effect and the damping between microcantilever and liquid influenced their responses.

Original languageEnglish
Title of host publication23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791851791
DOIs
StatePublished - 2018
EventASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2018 - Quebec City, Canada
Duration: 26 Aug 201829 Aug 2018

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Conference

ConferenceASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2018
Country/TerritoryCanada
CityQuebec City
Period26/08/1829/08/18

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