Epitaxial Sr-doped nickelate perovskite thin films and Ruddlesden-Popper phases grown by magnetron sputtering

Changhwan Kim; Min Young Jung; Yeong Gwang Khim; Kyeong Jun Lee; Young Jun Chang; Seo Hyoung Chang

doi:10.1016/j.cap.2025.05.012

Epitaxial Sr-doped nickelate perovskite thin films and Ruddlesden-Popper phases grown by magnetron sputtering

Changhwan Kim
, Min Young Jung
, Yeong Gwang Khim
, Kyeong Jun Lee
, Young Jun Chang
, Seo Hyoung Chang

Department of Physics

Research output: Contribution to journal › Article › peer-review

Abstract

Sr-doped nickelate, Nd_1-xSr_xNiO₃ (NSNO), perovskite thin films and Ruddlesden-Popper (RP) phases are actively investigated because of their physical properties, such as the metal-insulator transition and superconductivity. However, achieving epitaxial growth of NSNO perovskite and RP phase films in a sputtering system is challenging compared to pulsed laser deposition and molecular beam epitaxy, due to the difficulty in stabilizing nickel oxidation states and minimizing structural defects. Here, we used an off-axis radio frequency (RF) magnetron sputtering to fabricate epitaxial NSNO perovskite and RP phase thin films on SrTiO₃ (001) substrates, systematically controlling the growth temperatures. We investigated the thermal stability of the perovskite phase and the structural and electronic characteristics of the RP phase films. These findings provide valuable insights into the synthesis of nickelate RP phase films using RF magnetron sputtering, paving the way for scalable thin films fabrication technologies.

Original language	English
Pages (from-to)	57-62
Number of pages	6
Journal	Current Applied Physics
Volume	77
DOIs	https://doi.org/10.1016/j.cap.2025.05.012
State	Published - Sep 2025

Keywords

Epitaxial film
Nickelate
Perovskite
Ruddlesden-Popper phase
Sputtering

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10.1016/j.cap.2025.05.012

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title = "Epitaxial Sr-doped nickelate perovskite thin films and Ruddlesden-Popper phases grown by magnetron sputtering",

abstract = "Sr-doped nickelate, Nd1-xSrxNiO3 (NSNO), perovskite thin films and Ruddlesden-Popper (RP) phases are actively investigated because of their physical properties, such as the metal-insulator transition and superconductivity. However, achieving epitaxial growth of NSNO perovskite and RP phase films in a sputtering system is challenging compared to pulsed laser deposition and molecular beam epitaxy, due to the difficulty in stabilizing nickel oxidation states and minimizing structural defects. Here, we used an off-axis radio frequency (RF) magnetron sputtering to fabricate epitaxial NSNO perovskite and RP phase thin films on SrTiO3 (001) substrates, systematically controlling the growth temperatures. We investigated the thermal stability of the perovskite phase and the structural and electronic characteristics of the RP phase films. These findings provide valuable insights into the synthesis of nickelate RP phase films using RF magnetron sputtering, paving the way for scalable thin films fabrication technologies.",

keywords = "Epitaxial film, Nickelate, Perovskite, Ruddlesden-Popper phase, Sputtering",

author = "Changhwan Kim and Jung, \{Min Young\} and Khim, \{Yeong Gwang\} and Lee, \{Kyeong Jun\} and Chang, \{Young Jun\} and Chang, \{Seo Hyoung\}",

note = "Publisher Copyright: {\textcopyright} 2025 Korean Physical Society",

year = "2025",

month = sep,

doi = "10.1016/j.cap.2025.05.012",

language = "English",

volume = "77",

pages = "57--62",

journal = "Current Applied Physics",

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T1 - Epitaxial Sr-doped nickelate perovskite thin films and Ruddlesden-Popper phases grown by magnetron sputtering

AU - Kim, Changhwan

AU - Jung, Min Young

AU - Khim, Yeong Gwang

AU - Lee, Kyeong Jun

AU - Chang, Young Jun

AU - Chang, Seo Hyoung

PY - 2025/9

Y1 - 2025/9

N2 - Sr-doped nickelate, Nd1-xSrxNiO3 (NSNO), perovskite thin films and Ruddlesden-Popper (RP) phases are actively investigated because of their physical properties, such as the metal-insulator transition and superconductivity. However, achieving epitaxial growth of NSNO perovskite and RP phase films in a sputtering system is challenging compared to pulsed laser deposition and molecular beam epitaxy, due to the difficulty in stabilizing nickel oxidation states and minimizing structural defects. Here, we used an off-axis radio frequency (RF) magnetron sputtering to fabricate epitaxial NSNO perovskite and RP phase thin films on SrTiO3 (001) substrates, systematically controlling the growth temperatures. We investigated the thermal stability of the perovskite phase and the structural and electronic characteristics of the RP phase films. These findings provide valuable insights into the synthesis of nickelate RP phase films using RF magnetron sputtering, paving the way for scalable thin films fabrication technologies.

AB - Sr-doped nickelate, Nd1-xSrxNiO3 (NSNO), perovskite thin films and Ruddlesden-Popper (RP) phases are actively investigated because of their physical properties, such as the metal-insulator transition and superconductivity. However, achieving epitaxial growth of NSNO perovskite and RP phase films in a sputtering system is challenging compared to pulsed laser deposition and molecular beam epitaxy, due to the difficulty in stabilizing nickel oxidation states and minimizing structural defects. Here, we used an off-axis radio frequency (RF) magnetron sputtering to fabricate epitaxial NSNO perovskite and RP phase thin films on SrTiO3 (001) substrates, systematically controlling the growth temperatures. We investigated the thermal stability of the perovskite phase and the structural and electronic characteristics of the RP phase films. These findings provide valuable insights into the synthesis of nickelate RP phase films using RF magnetron sputtering, paving the way for scalable thin films fabrication technologies.

KW - Epitaxial film

KW - Nickelate

KW - Perovskite

KW - Ruddlesden-Popper phase

KW - Sputtering

UR - https://www.scopus.com/pages/publications/105007094991

U2 - 10.1016/j.cap.2025.05.012

DO - 10.1016/j.cap.2025.05.012

M3 - Article

AN - SCOPUS:105007094991

SN - 1567-1739

VL - 77

SP - 57

EP - 62

JO - Current Applied Physics

JF - Current Applied Physics

ER -

Epitaxial Sr-doped nickelate perovskite thin films and Ruddlesden-Popper phases grown by magnetron sputtering

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Keywords

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