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Escimer laser annealing effects of silicon-rich silicon nitride films prepared by using catalytic chemical vapor deposition
Kyoung Min Lee, Jae Dam Hwang, Youn Jin Lee, Sun Jae Kim, Min Koo Han, Seunghun Jang, Moonsup Han, Sunghwan Won, Junghyun Sok, Kyoungwan Park, Wan Shick Hong
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review