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Escimer laser annealing effects of silicon-rich silicon nitride films prepared by using catalytic chemical vapor deposition
- Kyoung Min Lee
- , Jae Dam Hwang
- , Youn Jin Lee
- , Sun Jae Kim
- , Min Koo Han
- , Seunghun Jang
- , Moonsup Han
- , Sunghwan Won
- , Junghyun Sok
- , Kyoungwan Park
- , Wan Shick Hong
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review