Experimental investigations of protection schemes for extreme ultraviolet lithography masks in carrier systems against horizontal aerosol flow
- Se Jin Yook
- , Heinz Fissan
- , Christof Asbach
- , Jung Hyeun Kim
- , Till Van Der Zwaag
- , Thomas Engelke
- , Pei Yang Yan
- , David Y.H. Pui
- University of Minnesota Twin Cities
- Institute of Energy and Environmental Technology
- Intel
Research output: Contribution to journal › Article › peer-review
17
Scopus
citations