Fabrication of a 3-dimensional microstructure by sequential anodic oxidation (SAO)

Younghun Kim, Sung Koo Kang, Inhee Choi, Jeongjin Lee, Jongheop Yi

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


Scanning probe lithography (SPL) has considerable potential for producing small features (<100 nm) with a high spatial precision, and would be useful for fabricating 2-dimensional (2D) structures. However, it has not been used successfully in the fabrication of 3-dimensional (3D) structures due to the low aspect ratio of the resulting feature. Herein, we describe a simple 3D pattering method with repeated SPL, in which precise layer-by-layer alignment is not needed. Results and processes of the pattern can be readily observed in real-time. Using the proposed method, we successfully fabricated a 3D pyramidal structure. Additional growth for repeated oxidation was observed due to the superposition of energy absorbed on the pre-oxidized species.

Original languageEnglish
Pages (from-to)308-312
Number of pages5
JournalMicroelectronic Engineering
Issue number2
StatePublished - Feb 2007


  • 3D nanopatterning
  • Anodic oxidation
  • Scanning probe lithography


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