Fabrication of a 3-dimensional microstructure by sequential anodic oxidation (SAO)

Scanning probe lithography (SPL) has considerable potential for producing small features (<100 nm) with a high spatial precision, and would be useful for fabricating 2-dimensional (2D) structures. However, it has not been used successfully in the fabrication of 3-dimensional (3D) structures due to the low aspect ratio of the resulting feature. Herein, we describe a simple 3D pattering method with repeated SPL, in which precise layer-by-layer alignment is not needed. Results and processes of the pattern can be readily observed in real-time. Using the proposed method, we successfully fabricated a 3D pyramidal structure. Additional growth for repeated oxidation was observed due to the superposition of energy absorbed on the pre-oxidized species.