Fabrication of high quality YBa2Cu3Oy thin films using pulsed laser deposition

Eun-Hong Lee Eun-Hong; Sang Jin Park; I. Hun Song; Insang Song; Junho Gohng; Junghyun Sok; J. W. Lee

doi:10.1109/77.620713

Fabrication of high quality YBa₂Cu₃O_y thin films using pulsed laser deposition

Eun-Hong Lee Eun-Hong, Sang Jin Park, I. Hun Song, Insang Song, Junho Gohng, Junghyun Sok, J. W. Lee

Department of Physics

Samsung

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Ecole Nationale Superieure de Chimie et de Physique de Bordeaux, France High quality YBa₂Cu₃O_y (YBCO) thin films for directly coupled DC-SQUIDs were fabricated by pulsed laser deposition. Several critical parameters have been optimized through systematic studies. The best quality YBCO thin films on MgO and on LaAlO₃ substrates were made under the O₂ pressure of 400-500 mTorr at the substrate temperature of 780 -800t; and target to substrate distance of 50-60 mm. Films showing a T_c above 91 K and J_c above 2×10⁶ A/cm² at 77 K were routinely obtained. Extensive AFM and x-ray diffraction studies have been conducted for morphological and structural analyses. The directly coupled DC-SQUIDs were fabricated from the YBCO thin films deposited on SrTiO₃ bicrystals under the optimized conditions. Measurement of 2I_c and swing voltage gives values of 420μA and 30μV at 77 K, respectively.

Original language	English
Pages (from-to)	1193-1196
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	7
Issue number	2 PART 2
DOIs	https://doi.org/10.1109/77.620713
State	Published - 1997

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title = "Fabrication of high quality YBa2Cu3Oy thin films using pulsed laser deposition",

abstract = "Ecole Nationale Superieure de Chimie et de Physique de Bordeaux, France High quality YBa2Cu3Oy (YBCO) thin films for directly coupled DC-SQUIDs were fabricated by pulsed laser deposition. Several critical parameters have been optimized through systematic studies. The best quality YBCO thin films on MgO and on LaAlO3 substrates were made under the O2 pressure of 400-500 mTorr at the substrate temperature of 780 -800t; and target to substrate distance of 50-60 mm. Films showing a Tc above 91 K and Jc above 2×106 A/cm2 at 77 K were routinely obtained. Extensive AFM and x-ray diffraction studies have been conducted for morphological and structural analyses. The directly coupled DC-SQUIDs were fabricated from the YBCO thin films deposited on SrTiO3 bicrystals under the optimized conditions. Measurement of 2Ic and swing voltage gives values of 420μA and 30μV at 77 K, respectively.",

author = "{Lee Eun-Hong}, Eun-Hong and Park, {Sang Jin} and Song, {I. Hun} and Insang Song and Junho Gohng and Junghyun Sok and Lee, {J. W.}",

year = "1997",

doi = "10.1109/77.620713",

language = "English",

volume = "7",

pages = "1193--1196",

journal = "IEEE Transactions on Applied Superconductivity",

issn = "1051-8223",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2 PART 2",

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TY - JOUR

T1 - Fabrication of high quality YBa2Cu3Oy thin films using pulsed laser deposition

AU - Lee Eun-Hong, Eun-Hong

AU - Park, Sang Jin

AU - Song, I. Hun

AU - Song, Insang

AU - Gohng, Junho

AU - Sok, Junghyun

AU - Lee, J. W.

PY - 1997

Y1 - 1997

N2 - Ecole Nationale Superieure de Chimie et de Physique de Bordeaux, France High quality YBa2Cu3Oy (YBCO) thin films for directly coupled DC-SQUIDs were fabricated by pulsed laser deposition. Several critical parameters have been optimized through systematic studies. The best quality YBCO thin films on MgO and on LaAlO3 substrates were made under the O2 pressure of 400-500 mTorr at the substrate temperature of 780 -800t; and target to substrate distance of 50-60 mm. Films showing a Tc above 91 K and Jc above 2×106 A/cm2 at 77 K were routinely obtained. Extensive AFM and x-ray diffraction studies have been conducted for morphological and structural analyses. The directly coupled DC-SQUIDs were fabricated from the YBCO thin films deposited on SrTiO3 bicrystals under the optimized conditions. Measurement of 2Ic and swing voltage gives values of 420μA and 30μV at 77 K, respectively.

AB - Ecole Nationale Superieure de Chimie et de Physique de Bordeaux, France High quality YBa2Cu3Oy (YBCO) thin films for directly coupled DC-SQUIDs were fabricated by pulsed laser deposition. Several critical parameters have been optimized through systematic studies. The best quality YBCO thin films on MgO and on LaAlO3 substrates were made under the O2 pressure of 400-500 mTorr at the substrate temperature of 780 -800t; and target to substrate distance of 50-60 mm. Films showing a Tc above 91 K and Jc above 2×106 A/cm2 at 77 K were routinely obtained. Extensive AFM and x-ray diffraction studies have been conducted for morphological and structural analyses. The directly coupled DC-SQUIDs were fabricated from the YBCO thin films deposited on SrTiO3 bicrystals under the optimized conditions. Measurement of 2Ic and swing voltage gives values of 420μA and 30μV at 77 K, respectively.

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DO - 10.1109/77.620713

M3 - Article

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SN - 1051-8223

VL - 7

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EP - 1196

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 2 PART 2

ER -

Fabrication of high quality YBa₂Cu₃O_y thin films using pulsed laser deposition

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