Fabrication of high quality YBa2Cu3Oy thin films using pulsed laser deposition

Eun-Hong Lee Eun-Hong, Sang Jin Park, I. Hun Song, Insang Song, Junho Gohng, Junghyun Sok, J. W. Lee

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


Ecole Nationale Superieure de Chimie et de Physique de Bordeaux, France High quality YBa2Cu3Oy (YBCO) thin films for directly coupled DC-SQUIDs were fabricated by pulsed laser deposition. Several critical parameters have been optimized through systematic studies. The best quality YBCO thin films on MgO and on LaAlO3 substrates were made under the O2 pressure of 400-500 mTorr at the substrate temperature of 780 -800t; and target to substrate distance of 50-60 mm. Films showing a Tc above 91 K and Jc above 2×106 A/cm2 at 77 K were routinely obtained. Extensive AFM and x-ray diffraction studies have been conducted for morphological and structural analyses. The directly coupled DC-SQUIDs were fabricated from the YBCO thin films deposited on SrTiO3 bicrystals under the optimized conditions. Measurement of 2Ic and swing voltage gives values of 420μA and 30μV at 77 K, respectively.

Original languageEnglish
Pages (from-to)1193-1196
Number of pages4
JournalIEEE Transactions on Applied Superconductivity
Issue number2 PART 2
StatePublished - 1997


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