Fabrication of submicron-sized copper structures on pre-patterned self-assembled monolayer and langmuir-blodgett films

Inhee Choi; Younghun Kim; Sung Koo Kang; Jeongjin Lee; Jongheop Yi

doi:10.1007/BF02706656

Fabrication of submicron-sized copper structures on pre-patterned self-assembled monolayer and langmuir-blodgett films

Inhee Choi, Younghun Kim, Sung Koo Kang, Jeongjin Lee, Jongheop Yi

Department of Life Science

Seoul National University

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

The fabrication of a metal microstructure on pre-patterned organic templates, prepared using SAM and LB techniques is described. The OTS derivatized substrate was oxidized by AFM anodic oxidation at the threshold voltage. Site-selective copper structure was then fabricated on the locally modified monolayer based on pre-designed patterns. The sequential adsorption-reduction of copper ion was carried out, leading to improved metal coverage and a reduction in defects.

Original language	English
Pages (from-to)	635-638
Number of pages	4
Journal	Korean Journal of Chemical Engineering
Volume	22
Issue number	4
DOIs	https://doi.org/10.1007/BF02706656
State	Published - Jul 2005

Keywords

AFM Anodic Oxidation
Copper
Langmuir-Blodgett Film
Self-assembled Monolayer

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10.1007/BF02706656

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title = "Fabrication of submicron-sized copper structures on pre-patterned self-assembled monolayer and langmuir-blodgett films",

abstract = "The fabrication of a metal microstructure on pre-patterned organic templates, prepared using SAM and LB techniques is described. The OTS derivatized substrate was oxidized by AFM anodic oxidation at the threshold voltage. Site-selective copper structure was then fabricated on the locally modified monolayer based on pre-designed patterns. The sequential adsorption-reduction of copper ion was carried out, leading to improved metal coverage and a reduction in defects.",

keywords = "AFM Anodic Oxidation, Copper, Langmuir-Blodgett Film, Self-assembled Monolayer",

author = "Inhee Choi and Younghun Kim and Kang, {Sung Koo} and Jeongjin Lee and Jongheop Yi",

year = "2005",

month = jul,

doi = "10.1007/BF02706656",

language = "English",

volume = "22",

pages = "635--638",

journal = "Korean Journal of Chemical Engineering",

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TY - JOUR

T1 - Fabrication of submicron-sized copper structures on pre-patterned self-assembled monolayer and langmuir-blodgett films

AU - Choi, Inhee

AU - Kim, Younghun

AU - Kang, Sung Koo

AU - Lee, Jeongjin

AU - Yi, Jongheop

PY - 2005/7

Y1 - 2005/7

N2 - The fabrication of a metal microstructure on pre-patterned organic templates, prepared using SAM and LB techniques is described. The OTS derivatized substrate was oxidized by AFM anodic oxidation at the threshold voltage. Site-selective copper structure was then fabricated on the locally modified monolayer based on pre-designed patterns. The sequential adsorption-reduction of copper ion was carried out, leading to improved metal coverage and a reduction in defects.

AB - The fabrication of a metal microstructure on pre-patterned organic templates, prepared using SAM and LB techniques is described. The OTS derivatized substrate was oxidized by AFM anodic oxidation at the threshold voltage. Site-selective copper structure was then fabricated on the locally modified monolayer based on pre-designed patterns. The sequential adsorption-reduction of copper ion was carried out, leading to improved metal coverage and a reduction in defects.

KW - AFM Anodic Oxidation

KW - Copper

KW - Langmuir-Blodgett Film

KW - Self-assembled Monolayer

UR - http://www.scopus.com/inward/record.url?scp=27144458438&partnerID=8YFLogxK

U2 - 10.1007/BF02706656

DO - 10.1007/BF02706656

M3 - Article

AN - SCOPUS:27144458438

SN - 0256-1115

VL - 22

SP - 635

EP - 638

JO - Korean Journal of Chemical Engineering

JF - Korean Journal of Chemical Engineering

IS - 4

ER -

Fabrication of submicron-sized copper structures on pre-patterned self-assembled monolayer and langmuir-blodgett films

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Keywords

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