TY - GEN
T1 - Feedback control design for cluster tools with wafer residency time constraints
AU - Kim, Chulhan
AU - Lee, Tae Eog
PY - 2012
Y1 - 2012
N2 - Cluster tools for semiconductor manufacturing have been studied widely in terms of transportation robot scheduling. Cluster tool systems are discrete event systems, and usually modeled in timed Petri nets and timed event graphs. Many efficient robot operation sequences such as the backward sequence and the swap sequence have been developed, but they do not guarantee efficiency under consideration of wafer residency time constraints for some process modules. In this paper, we propose a way to control cluster tools with wafer residency time constraints using the max-plus algebra and timed event graphs. Conditions to meet time constraints are developed, and we introduce a methodology to add feedback control arcs to timed event graph models of single-armed cluster tools with the backward sequence, and dual-armed cluster tools with the swap sequence. Bounded variation on processing times also considered as well as time constraints.
AB - Cluster tools for semiconductor manufacturing have been studied widely in terms of transportation robot scheduling. Cluster tool systems are discrete event systems, and usually modeled in timed Petri nets and timed event graphs. Many efficient robot operation sequences such as the backward sequence and the swap sequence have been developed, but they do not guarantee efficiency under consideration of wafer residency time constraints for some process modules. In this paper, we propose a way to control cluster tools with wafer residency time constraints using the max-plus algebra and timed event graphs. Conditions to meet time constraints are developed, and we introduce a methodology to add feedback control arcs to timed event graph models of single-armed cluster tools with the backward sequence, and dual-armed cluster tools with the swap sequence. Bounded variation on processing times also considered as well as time constraints.
KW - cluster tools
KW - feedback control
KW - timed event graphs
KW - wafer residency time constraints
UR - http://www.scopus.com/inward/record.url?scp=84872385140&partnerID=8YFLogxK
U2 - 10.1109/ICSMC.2012.6378261
DO - 10.1109/ICSMC.2012.6378261
M3 - Conference contribution
AN - SCOPUS:84872385140
SN - 9781467317146
T3 - Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics
SP - 3063
EP - 3068
BT - Proceedings 2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012
T2 - 2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012
Y2 - 14 October 2012 through 17 October 2012
ER -