Ferroelectric properties of SrRu O3 BaTi O3 SrRu O3 ultrathin film capacitors free from passive layers

Y. S. Kim, J. Y. Jo, D. J. Kim, Y. J. Chang, J. H. Lee, T. W. Noh, T. K. Song, J. G. Yoon, J. S. Chung, S. I. Baik, Y. W. Kim, C. U. Jung

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Abstract

Structural studies on ultrathin SrRu O3 BaTi O3 SrRu O3 capacitors, with BaTi O3 thicknesses of between 5 nm and 30 nm, show well-defined interfaces between ferroelectric BaTi O3 and electrode SrRu O3 layers. In these capacitors, we cannot observe any extrinsic electrical effects due to either the formation of an insulating interfacial passive layer or passive-layer-induced charge injection. Such high-quality interfaces result in very good fatigue endurance, even for the 5 nm thick BaTi O3 capacitor.

Original languageEnglish
Article number072909
JournalApplied Physics Letters
Volume88
Issue number7
DOIs
StatePublished - 2006

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