Abstract
J. Polym. Sci., Part A: Polym. Chem. 2015, 53, 1252-1259 Fluorous solvent-soluble, photoreactive polymers were designed using the photodimerization of anthracene moieties. Four random copolymers with Mn=20,000-27,000 were synthesized, involving an anthracene-containing monomer and a fluorinated methacrylate with varying compositions. The polymers showed sufficient solubility in the fluorous solvents but were rendered insoluble by UV irradiation. One of the copolymers, FSIM-2, shows promise as a photoreactive imaging material for the photolithographic patterning of OLED pixels.
Highly fluorinated photoresist polymers that can undergo photodimerization reactions were designed using an anthracene-based monomer. Through the random radical copolymerizations of 6-(anthracen-9-yl)hexyl methacrylate (AHMA) and semiperfluorodecyl methacrylate (FDMA) with four different compositions, polymers with Mn=20,000-27,000 (Mw/Mn=2.0-2.9) were prepared in benzotrifluoride. The polymers, in particular fluorous solvent-soluble imaging material-2 (FSIM-2), showed sufficient solubility in fluorous solvents, including hydrofluoroethers, but were rendered insoluble by UV exposure (365 nm). This photochemical solubility change was evaluated quantitatively by a quartz crystal microbalance technique, along with tracing the chemical reaction by UV-vis spectroscopy. Finally, FSIM-2 and fluorous solvents were applied to the photolithographic patterning of organic light-emitting diode pixels. In the patterning protocol involving the lift-off of resist films in fluorous solvents, FSIM-2 was recognized as a promising photoreactive material when compared with a reference polymer P(FDMA-MAMA), which necessitates acidolysis reactions for lithographic imaging.
Original language | English |
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Pages (from-to) | 1252-1259 |
Number of pages | 8 |
Journal | Journal of Polymer Science, Part A: Polymer Chemistry |
Volume | 53 |
Issue number | 10 |
DOIs | |
State | Published - 15 May 2015 |
Keywords
- anthracene
- fluoropolymers
- fluorous solvent
- organic light-emitting diode
- photodimerization
- photolithography
- photoreactive effects
- photoresists
- synthesis