Abstract
A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the SnO2-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the SnO 2-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5-5.0 ppm) and different operation temperatures (350-550°C). The SnO2-10 mol%ZnO sensor showed the highest sensitivity (Rs=0.24) for 1.0 ppm-formaldehyde at 500°C and response time (90% saturation time) was within 20 seconds.
| Original language | English |
|---|---|
| Pages (from-to) | 169-174 |
| Number of pages | 6 |
| Journal | Journal of Korean Institute of Metals and Materials |
| Volume | 48 |
| Issue number | 2 |
| DOIs | |
| State | Published - Feb 2010 |
Keywords
- Electrical conductivity/resistivity
- Electrical properties
- Formaldehyde sensor
- Nanostructured materials
- Sol-gel