Gas sensing characteristics of MEMS gas sensor arrays in binary mixed-gas system

Bum Joon Kim, Jung Sik Kim

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

MOS gas sensor arrays based on MEMS gas sensor platforms were developed for the detection of carbon monoxide (CO), nitrogen oxides (NOx) and ammonia (NH3), and their gas sensing characteristics in binary mixed-gas system were investigated. Three gas sensing materials with nano-sized particles for these target gases, Pd-SnO2 for CO, In 2O3 for NOx and Ru-WO3 for NH 3 were synthesized using a sol-gel method. All the sensors showed good properties for their target gases at the optimum points for micro-heater operation. From the experimental data in MEMS gas sensor arrays in a binary mixed system, the gas sensing behavior and sensor response in mixed gas systems were scrutinized. The gas sensing behaviors to the mixed gas systems suggested that specific adsorption and selective activation of adsorption sites might occur in gas mixtures and offer the priority for the adsorption of specific gas. Thorough analysis of the sensing performance of the sensor arrays will make it possible to discriminate the components in gas mixtures as well as their concentrations.

Original languageEnglish
Pages (from-to)366-374
Number of pages9
JournalMaterials Chemistry and Physics
Volume138
Issue number1
DOIs
StatePublished - 15 Feb 2013

Keywords

  • Ceramics
  • Electrochemical properties
  • Electromechanical techniques
  • Oxides
  • Sol-gel growth

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