Gas sensing properties of nano-crystalline SnO2-CuO compounds

Jin Ho Yoon; Jung Sik Kim

doi:10.1007/s12540-010-1012-9

Gas sensing properties of nano-crystalline SnO₂-CuO compounds

Jin Ho Yoon, Jung Sik Kim

Department of Materials Science and Engineering

University of Seoul

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

We fabricated a micro gas sensor for hydrogen sulfide (H₂S) gas using MEMS technology and the sol-gel process, and synthesized SnO ₂-CuO as a sensing material by the sol-gel method. Synthesized particles of SnO₂-CuO were characterized with an average particle size of about 40 nm as measured by FE-SEM imagery and XRD peaks. The sensing material was coated on the micro platform and annealed at 400 °C. The maximum gas sensitivity (R_s=R_g/R_a) was 0.005 at 300 °C for 1.0 ppm - H₂S. The gas sensitivity showed linear behavior with increasing H₂S concentration.

Original language	English
Pages (from-to)	773-777
Number of pages	5
Journal	Metals and Materials International
Volume	16
Issue number	5
DOIs	https://doi.org/10.1007/s12540-010-1012-9
State	Published - Oct 2010

Keywords

Compounds
Conductivity
Electrical resistivity
Nanostructured materials
Sol-gel

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abstract = "We fabricated a micro gas sensor for hydrogen sulfide (H2S) gas using MEMS technology and the sol-gel process, and synthesized SnO 2-CuO as a sensing material by the sol-gel method. Synthesized particles of SnO2-CuO were characterized with an average particle size of about 40 nm as measured by FE-SEM imagery and XRD peaks. The sensing material was coated on the micro platform and annealed at 400 °C. The maximum gas sensitivity (Rs=Rg/Ra) was 0.005 at 300 °C for 1.0 ppm - H2S. The gas sensitivity showed linear behavior with increasing H2S concentration.",

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AU - Yoon, Jin Ho

AU - Kim, Jung Sik

PY - 2010/10

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N2 - We fabricated a micro gas sensor for hydrogen sulfide (H2S) gas using MEMS technology and the sol-gel process, and synthesized SnO 2-CuO as a sensing material by the sol-gel method. Synthesized particles of SnO2-CuO were characterized with an average particle size of about 40 nm as measured by FE-SEM imagery and XRD peaks. The sensing material was coated on the micro platform and annealed at 400 °C. The maximum gas sensitivity (Rs=Rg/Ra) was 0.005 at 300 °C for 1.0 ppm - H2S. The gas sensitivity showed linear behavior with increasing H2S concentration.

AB - We fabricated a micro gas sensor for hydrogen sulfide (H2S) gas using MEMS technology and the sol-gel process, and synthesized SnO 2-CuO as a sensing material by the sol-gel method. Synthesized particles of SnO2-CuO were characterized with an average particle size of about 40 nm as measured by FE-SEM imagery and XRD peaks. The sensing material was coated on the micro platform and annealed at 400 °C. The maximum gas sensitivity (Rs=Rg/Ra) was 0.005 at 300 °C for 1.0 ppm - H2S. The gas sensitivity showed linear behavior with increasing H2S concentration.

KW - Compounds

KW - Conductivity

KW - Electrical resistivity

KW - Nanostructured materials

KW - Sol-gel

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SN - 1598-9623

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SP - 773

EP - 777

JO - Metals and Materials International

JF - Metals and Materials International

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ER -

Gas sensing properties of nano-crystalline SnO₂-CuO compounds

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Keywords

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