Abstract
We fabricated a micro gas sensor for hydrogen sulfide (H2S) gas using MEMS technology and the sol-gel process, and synthesized SnO 2-CuO as a sensing material by the sol-gel method. Synthesized particles of SnO2-CuO were characterized with an average particle size of about 40 nm as measured by FE-SEM imagery and XRD peaks. The sensing material was coated on the micro platform and annealed at 400 °C. The maximum gas sensitivity (Rs=Rg/Ra) was 0.005 at 300 °C for 1.0 ppm - H2S. The gas sensitivity showed linear behavior with increasing H2S concentration.
| Original language | English |
|---|---|
| Pages (from-to) | 773-777 |
| Number of pages | 5 |
| Journal | Metals and Materials International |
| Volume | 16 |
| Issue number | 5 |
| DOIs | |
| State | Published - Oct 2010 |
Keywords
- Compounds
- Conductivity
- Electrical resistivity
- Nanostructured materials
- Sol-gel