Heteroepitaxial growth behavior of Mn-doped ZnO thin films on Al 2O3 (0001) by pulsed laser deposition

Sang Sub Kim; Jong Ha Moon; Byung Teak Lee; Oh Sung Song; Jung Ho Je

doi:10.1063/1.1632547

Heteroepitaxial growth behavior of Mn-doped ZnO thin films on Al ₂O₃ (0001) by pulsed laser deposition

Sang Sub Kim, Jong Ha Moon, Byung Teak Lee, Oh Sung Song, Jung Ho Je

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

106 Scopus citations

Abstract

The change in microstructure and growth behavior of Mn-doped ZnO films was investigated as a function of Mn content. The films were deposited on Al ₂O₃ (001) single crystal substrate using pulsed laser deposition. It was found that a small amount of Mn doping improved the atomic alignment in the in-plane and in the out-of-plane directions, and led to the formation of a singly oriented film, by suppressing the hexagon-on-hexagon growth. The superior epitaxial growth of the film with 0.05 at.% Mn content was associated with the microstructure, which showed much larger grains than the other films.

Original language	English
Pages (from-to)	454-459
Number of pages	6
Journal	Journal of Applied Physics
Volume	95
Issue number	2
DOIs	https://doi.org/10.1063/1.1632547
State	Published - 15 Jan 2004

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title = "Heteroepitaxial growth behavior of Mn-doped ZnO thin films on Al 2O3 (0001) by pulsed laser deposition",

abstract = "The change in microstructure and growth behavior of Mn-doped ZnO films was investigated as a function of Mn content. The films were deposited on Al 2O3 (001) single crystal substrate using pulsed laser deposition. It was found that a small amount of Mn doping improved the atomic alignment in the in-plane and in the out-of-plane directions, and led to the formation of a singly oriented film, by suppressing the hexagon-on-hexagon growth. The superior epitaxial growth of the film with 0.05 at.% Mn content was associated with the microstructure, which showed much larger grains than the other films.",

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AU - Kim, Sang Sub

AU - Moon, Jong Ha

AU - Lee, Byung Teak

AU - Song, Oh Sung

AU - Je, Jung Ho

PY - 2004/1/15

Y1 - 2004/1/15

N2 - The change in microstructure and growth behavior of Mn-doped ZnO films was investigated as a function of Mn content. The films were deposited on Al 2O3 (001) single crystal substrate using pulsed laser deposition. It was found that a small amount of Mn doping improved the atomic alignment in the in-plane and in the out-of-plane directions, and led to the formation of a singly oriented film, by suppressing the hexagon-on-hexagon growth. The superior epitaxial growth of the film with 0.05 at.% Mn content was associated with the microstructure, which showed much larger grains than the other films.

AB - The change in microstructure and growth behavior of Mn-doped ZnO films was investigated as a function of Mn content. The films were deposited on Al 2O3 (001) single crystal substrate using pulsed laser deposition. It was found that a small amount of Mn doping improved the atomic alignment in the in-plane and in the out-of-plane directions, and led to the formation of a singly oriented film, by suppressing the hexagon-on-hexagon growth. The superior epitaxial growth of the film with 0.05 at.% Mn content was associated with the microstructure, which showed much larger grains than the other films.

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JO - Journal of Applied Physics

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IS - 2

ER -

Heteroepitaxial growth behavior of Mn-doped ZnO thin films on Al ₂O₃ (0001) by pulsed laser deposition

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