Abstract
A highly sensitive formaldehyde (HCHO) gas sensor was fabricated from SnO 2-ZnO nanocomposite by sol-gel method on the microelectromechanical system (MEMS) gas sensor platform. SnO 2-ZnO composites with different chemical compositions were synthesized and Pd nanoparticles were mixed with the nanocomposites as a catalytic material. The composites were characterized by structural analyses using X-ray diffraction, DSC-TGA, and SEM observation. The SnO 2-ZnO nanocomposite system demonstrated high gas sensitivity to HCHO and the Pd nanoparticles served as an excellent support material that further enhanced the selective gas adsorption. In particular, the 1 wt% Pd-mixed SZ3 sensor displayed good HCHO sensitivity (R S = R g/R a, R S = 0.02 at 550 °C), response and recovery times (15 sec and 20 sec). Our synthesis method provided an inexpensive and flexible, wet-chemical route capable of tailoring semiconductor metal oxide nanocomposites for the selective and reproducible detection of HCHO gas at parts per billion levels.
Original language | English |
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Pages (from-to) | 1-7 |
Number of pages | 7 |
Journal | Sensor Letters |
Volume | 10 |
Issue number | 1-2 |
DOIs | |
State | Published - Jan 2012 |
Keywords
- Formaldehyde
- Gas Sensor
- MEMS
- Nanocomposite
- Sol-Gel