Highly sensitive hydrogen sensor with a nano bumpy structured Pd film

Bum Joon Kim; Jung Sik Kim

doi:10.1109/NANO.2013.6720997

Highly sensitive hydrogen sensor with a nano bumpy structured Pd film

Bum Joon Kim, Jung Sik Kim

Department of Materials Science and Engineering

University of Seoul

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

In this study, a highly sensitive hydrogen gas sensor of the multi-layer and micro-heater type was designed and fabricated using a microelectromechanical system (MEMS) process. The sensing layer of palladium deposited in the middle of the sensor platform was modified to be a nano-bumpy structure using nanosized polystyrene beads. The root-mean square roughness measured by AFM was 9.07 nm for the nano-bumpy Pd structure whereas that of the simple Pd thin film was 0.98 nm. At hydrogen gas concentration of 2,000 ppm, the sensitivity of the simple Pd thin film and the Pd nano-bumpy film was 0.638 and 1.045, respectively. The sensitivity of the Pd nano-bumpy film was much higher than that of the Pd thin film due to the very high surface-to-volume ratio of the nano-bumpy Pd structure.

Original language	English
Title of host publication	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Pages	1212-1215
Number of pages	4
DOIs	https://doi.org/10.1109/NANO.2013.6720997
State	Published - 2013
Event	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 - Beijing, China Duration: 5 Aug 2013 → 8 Aug 2013

Publication series

Name	Proceedings of the IEEE Conference on Nanotechnology
ISSN (Print)	1944-9399
ISSN (Electronic)	1944-9380

Conference

Conference	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Country/Territory	China
City	Beijing
Period	5/08/13 → 8/08/13

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10.1109/NANO.2013.6720997

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title = "Highly sensitive hydrogen sensor with a nano bumpy structured Pd film",

abstract = "In this study, a highly sensitive hydrogen gas sensor of the multi-layer and micro-heater type was designed and fabricated using a microelectromechanical system (MEMS) process. The sensing layer of palladium deposited in the middle of the sensor platform was modified to be a nano-bumpy structure using nanosized polystyrene beads. The root-mean square roughness measured by AFM was 9.07 nm for the nano-bumpy Pd structure whereas that of the simple Pd thin film was 0.98 nm. At hydrogen gas concentration of 2,000 ppm, the sensitivity of the simple Pd thin film and the Pd nano-bumpy film was 0.638 and 1.045, respectively. The sensitivity of the Pd nano-bumpy film was much higher than that of the Pd thin film due to the very high surface-to-volume ratio of the nano-bumpy Pd structure.",

author = "Kim, {Bum Joon} and Kim, {Jung Sik}",

year = "2013",

doi = "10.1109/NANO.2013.6720997",

language = "English",

isbn = "9781479906758",

series = "Proceedings of the IEEE Conference on Nanotechnology",

pages = "1212--1215",

booktitle = "2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013",

note = "2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 ; Conference date: 05-08-2013 Through 08-08-2013",

}

Kim, BJ & Kim, JS 2013, Highly sensitive hydrogen sensor with a nano bumpy structured Pd film. in 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013., 6720997, Proceedings of the IEEE Conference on Nanotechnology, pp. 1212-1215, 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013, Beijing, China, 5/08/13. https://doi.org/10.1109/NANO.2013.6720997

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AU - Kim, Bum Joon

AU - Kim, Jung Sik

PY - 2013

Y1 - 2013

N2 - In this study, a highly sensitive hydrogen gas sensor of the multi-layer and micro-heater type was designed and fabricated using a microelectromechanical system (MEMS) process. The sensing layer of palladium deposited in the middle of the sensor platform was modified to be a nano-bumpy structure using nanosized polystyrene beads. The root-mean square roughness measured by AFM was 9.07 nm for the nano-bumpy Pd structure whereas that of the simple Pd thin film was 0.98 nm. At hydrogen gas concentration of 2,000 ppm, the sensitivity of the simple Pd thin film and the Pd nano-bumpy film was 0.638 and 1.045, respectively. The sensitivity of the Pd nano-bumpy film was much higher than that of the Pd thin film due to the very high surface-to-volume ratio of the nano-bumpy Pd structure.

AB - In this study, a highly sensitive hydrogen gas sensor of the multi-layer and micro-heater type was designed and fabricated using a microelectromechanical system (MEMS) process. The sensing layer of palladium deposited in the middle of the sensor platform was modified to be a nano-bumpy structure using nanosized polystyrene beads. The root-mean square roughness measured by AFM was 9.07 nm for the nano-bumpy Pd structure whereas that of the simple Pd thin film was 0.98 nm. At hydrogen gas concentration of 2,000 ppm, the sensitivity of the simple Pd thin film and the Pd nano-bumpy film was 0.638 and 1.045, respectively. The sensitivity of the Pd nano-bumpy film was much higher than that of the Pd thin film due to the very high surface-to-volume ratio of the nano-bumpy Pd structure.

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M3 - Conference contribution

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SN - 9781479906758

T3 - Proceedings of the IEEE Conference on Nanotechnology

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BT - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013

T2 - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013

Y2 - 5 August 2013 through 8 August 2013

ER -

Highly sensitive hydrogen sensor with a nano bumpy structured Pd film

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