Abstract
A Pd-functionalised hydrogen gas sensor based on an AlGaN/GaN heterostruture platform was investigated. The optimum bias voltage and reaction temperature were 0.1 V and 200°C, respectively, with which a wide range of hydrogen concentration from 0.1-4% in the air (i.e. 1000-40,000 ppm) was detectable. Not only low-power consumption but also high sensitivity with fast response was achieved due to the excellent properties of the AlGaN/GaN heterostructure platform. The sensitivity was 72.8% with a response time of ∼3 s in 4% hydrogen concentration.
Original language | English |
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Pages (from-to) | 1200-1202 |
Number of pages | 3 |
Journal | Electronics Letters |
Volume | 53 |
Issue number | 17 |
DOIs | |
State | Published - 17 Aug 2017 |