Hydrogen gas sensor of Pd-functionalised AlGaN/GaN heterostructure with high sensitivity and low-power consumption

J. H. Choi, M. G. Jo, S. W. Han, H. Kim, S. H. Kim, S. Jang, J. S. Kim, H. Y. Cha

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

A Pd-functionalised hydrogen gas sensor based on an AlGaN/GaN heterostruture platform was investigated. The optimum bias voltage and reaction temperature were 0.1 V and 200°C, respectively, with which a wide range of hydrogen concentration from 0.1-4% in the air (i.e. 1000-40,000 ppm) was detectable. Not only low-power consumption but also high sensitivity with fast response was achieved due to the excellent properties of the AlGaN/GaN heterostructure platform. The sensitivity was 72.8% with a response time of ∼3 s in 4% hydrogen concentration.

Original languageEnglish
Pages (from-to)1200-1202
Number of pages3
JournalElectronics Letters
Volume53
Issue number17
DOIs
StatePublished - 17 Aug 2017

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